SJ80C/SJ120C

Large-sized glass substrate transfer robot

• Perfect for horizontal transfer of 7th generation (SJ80C) through 9th generation (SJ120C) and other various-sized glass substrates. Fastest motion in its class
• Rotation speed: Maximum 180°/sec
• Up and down speed: Maximum 1,050 mm/sec Unique linkage structure applied to up and down axis
• High-rigidity structure for minimizing flexure and vibration
• Belt-less structure ensures high reliability and safety Moving cables are completely enclosed in the arm
• The enclosed design prevents particle generation and looks good too Application
• Glass substrate transferring